Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications (Woodhead Publishing Series in Electronic and Optical Materials)
By Unknown Author.
Description
Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device, or else by integrating sensing and actuating with information processing, analog-to-digital conversion and memory functions.Part one outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced ...
ISBN(s)
0857095021, 9780857095022
