User's Guide to Vacuum Technology
By John F. O'Hanlon.
Description
An introduction to the theory and practice of modern vacuum technology, with applications. Focuses on the understanding, operation, and selection of equipment for vacuum processes used in semiconductor, optical, and related technologies. This 2nd Edition has new information on components, lubrication, pump fluids, and other materials. Basic characteristics and operational procedures are given for each high-vacuum pumping system. - from Amzon
ISBN(s)
0471812420, 9780471812425
